|
A senior graduate level course on the application of simulation tools for design and verification of microelectronic processes and operation of semiconductor devices. Technology CAD tools include MicroTec and Silvaco (Athena/Atlas) process/device simulators, as well as other simulation tools for specific processes, and math programs that can be used for custom simulation. Various models that describe front-end silicon processes are explored emphasizing the importance of complex interactions and 2D effects, as devices are scaled deep submicron. Includes laboratory exercises on simulation and modeling. (0305-560, 701, 702) Class 3, Lab 3, Credit 4 (W)
|
